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Defect Control in Relaxed Graded GeSi/Si
Author(s):
E.A. Fitzgerald
,
Y.H. Xie
,
D Monroe
,
G.P. Watson
,
J.M. Kuo
,
P.J. Silverman
Publication date:
1993
Journal:
MSF
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Citation Behaviour and Practice
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DOI::
10.4028/www.scientific.net/MSF.143-147.471
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