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      Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

      Author(s): , , ,
      Publication date Created:
      Publication date (Print):
      Journal: Journal of Applied Physics
      Publisher: AIP Publishing

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          Atomic layer deposition: an overview.

          Steven George (2010)
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            Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

            Riikka Puurunen (2005)
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              A comprehensive review of ZnO materials and devices

              H Morkoç, V. Avrutin, M. A. Reshchikov … (2005)
              Article 0 comments Cited 357 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Applied Physics
                Abbreviated Title: Journal of Applied Physics
                Publisher: AIP Publishing
                ISSN (Print): 0021-8979
                ISSN (Electronic): 1089-7550
                Publication date Created: January 14 2013
                Publication date (Print): January 14 2013
                Volume: 113
                Issue: 2
                Page: 021301
                Article
                DOI: 10.1063/1.4757907
                SO-VID: 400f5e24-5306-4399-a4a3-37590551bba0
                Copyright statement: © 2013
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                Self URI (article page): http://aip.scitation.org/doi/10.1063/1.4757907

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