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      828. Growth of epitaxial silicon layers by vacuum evaporation. I. Experimental procedure and initial assessment

      Vacuum

      Elsevier BV

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          Journal
          Vacuum
          Vacuum
          Elsevier BV
          0042207X
          August 1964
          August 1964
          : 14
          : 8
          : 317
          Article
          10.1016/0042-207X(64)92032-9
          © 1964

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