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Structural analysis of multilayer metal nitride films CrN/MoN using electron backscatter diffraction (EBSD)
Author(s):
B. Postolnyi
,
O Bondar
,
M. Opielak
,
P Rogalski
,
J.P. Araujo
Publication date:
Journal:
Proceedings of the SPIE 10010, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VIII, 100100E
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HR-EBSD (High Resolution - Electron Back Scatter Diffraction)
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DOI::
10.1117/12.2243279
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