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      Novel seeding method for the growth of polycrystalline Si films with hemispherical grains

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      Applied Physics Letters
      AIP Publishing

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          New stacked capacitor structure using hemispherical‐grain polycrystalline‐silicon electrodes

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            Crystallization of Amorphous Silicon with Clean Surfaces

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              Author and article information

              Journal
              Applied Physics Letters
              Appl. Phys. Lett.
              AIP Publishing
              0003-6951
              1077-3118
              July 13 1992
              July 13 1992
              : 61
              : 2
              : 159-161
              Article
              10.1063/1.108204
              4048170e-f321-4d3a-86f7-2a7024b029c2
              © 1992
              History

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