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Novel seeding method for the growth of polycrystalline Si films with hemispherical grains
Author(s):
Akira Sakai
,
Toru Tatsumi
Publication date
Created:
July 13 1992
Publication date
(Print):
July 13 1992
Journal:
Applied Physics Letters
Publisher:
AIP Publishing
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New stacked capacitor structure using hemispherical‐grain polycrystalline‐silicon electrodes
K. Terada
,
H. Watanabe
,
E Ikawa
…
(1991)
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Crystallization of Amorphous Silicon with Clean Surfaces
Taeko Niino
,
Haruhiko Ono
,
Akira Sakai
…
(1991)
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Author and article information
Journal
Title:
Applied Physics Letters
Abbreviated Title:
Appl. Phys. Lett.
Publisher:
AIP Publishing
ISSN (Print):
0003-6951
ISSN (Electronic):
1077-3118
Publication date Created:
July 13 1992
Publication date (Print):
July 13 1992
Volume
: 61
Issue
: 2
Pages
: 159-161
Article
DOI:
10.1063/1.108204
SO-VID:
4048170e-f321-4d3a-86f7-2a7024b029c2
Copyright ©
© 1992
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