Title:
Semiconductor Science and Technology
Abbreviated Title:
Semicond. Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0268-1242
ISSN
(Electronic):
1361-6641
Publication date Created:
May
01 2009
Publication date
(Print):
May
14 2009
Publication date
(Electronic):
March
27 2009
Volume: 24
Issue: 5
Page: 055002
Article
DOI: 10.1088/0268-1242/24/5/055002
SO-VID: 40ec3457-1258-49bc-91cd-c8f2a9d80547
Copyright © ©
2009