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Wet chemical etching of silicate glasses in hydrofluoric acid based solutions
Author(s):
G. A. C. M. Spierings
Publication date
Created:
December 1993
Publication date
(Print):
December 1993
Journal:
Journal of Materials Science
Publisher:
Springer Nature
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Recursive Rule based Visual Categorization
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Principles of wet chemical processing in ULSI microfabrication
H. Kikyuama
,
I. Kawanabe
,
M Miyashita
…
(1991)
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Glass Source Diffusion in Si and SiO[sub 2]
P. R. Kennicott
,
D. Brown
(1971)
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Observations of Charged‐Particle Tracks in Solids
R M Walker
,
P. B. Price
(1962)
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Author and article information
Journal
Title:
Journal of Materials Science
Abbreviated Title:
J Mater Sci
Publisher:
Springer Nature
ISSN (Print):
0022-2461
ISSN (Electronic):
1573-4803
Publication date Created:
December 1993
Publication date (Print):
December 1993
Volume
: 28
Issue
: 23
Pages
: 6261-6273
Article
DOI:
10.1007/BF01352182
SO-VID:
432dc256-d64f-4a52-8aff-416818f68312
Copyright ©
© 1993
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