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      Wet chemical etching of silicate glasses in hydrofluoric acid based solutions

      Journal of Materials Science
      Springer Nature

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          Principles of wet chemical processing in ULSI microfabrication

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            Glass Source Diffusion in Si and SiO[sub 2]

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              Observations of Charged‐Particle Tracks in Solids

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                Author and article information

                Journal
                Journal of Materials Science
                J Mater Sci
                Springer Nature
                0022-2461
                1573-4803
                December 1993
                December 1993
                : 28
                : 23
                : 6261-6273
                Article
                10.1007/BF01352182
                432dc256-d64f-4a52-8aff-416818f68312
                © 1993
                History

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