Evaluation of Oxygen‐Related Carrier Recombination Centers in High‐Purity Czochralski‐Grown Si Crystals by the Bulk Lifetime Measurements

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Journal

Title: Journal of The Electrochemical Society

Abbreviated Title: J. Electrochem. Soc.

Publisher: The Electrochemical Society

ISSN (Print): 0013-4651

ISSN (Electronic): 1945-7111

Publication date Created: October 01 1995

Publication date (Electronic): December 07 2019

Publication date (Print): October 01 1995

Volume: 142

Issue: 10

Pages: 3505-3509

Affiliations

[1 ]SEH Research and Development Center, Shin‐Etsu Handotai Company, Limited, 2‐13‐1 Isobe, Annaka‐shi, Gunma‐ken 379‐01, Japan

Article

DOI: 10.1149/1.2050012

SO-VID: 44e1b845-eb22-42ec-a06e-b9213e322086

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https://iopscience.iop.org/page/copyright

https://iopscience.iop.org/info/page/text-and-data-mining

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ScienceOpen disciplines: Genetics

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ScienceOpen disciplines: Genetics

Evaluation of Oxygen‐Related Carrier Recombination Centers in High‐Purity Czochralski‐Grown Si Crystals by the Bulk Lifetime Measurements

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