Growth of conductive copper sulfide thin films by atomic layer deposition

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Journal

Journal ID (publisher-id): JMACEP

Title: Journal of Materials Chemistry

Abbreviated Title: J. Mater. Chem.

Publisher: Royal Society of Chemistry (RSC)

ISSN (Print): 09599428

ISSN (Electronic): 13645501

Publication date (Print): March 21 2002

Publication date (Electronic): February 21 2002

Volume: 12

Issue: 4

Pages: 1022-1026

Article

DOI: 10.1039/b105901g

SO-VID: 498516a3-3de9-4643-b929-2f790eac9357

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