Title:
Semiconductor Science and Technology
Abbreviated Title:
Semicond. Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0268-1242
ISSN
(Electronic):
1361-6641
Publication date Created:
March
01 2013
Publication date
(Print):
March
01 2013
Publication date
(Electronic):
February
04 2013
Volume: 28
Issue: 3
Page: 035006
Article
DOI: 10.1088/0268-1242/28/3/035006
SO-VID: 4bc9b685-a212-4502-adaa-d531f94d0701
Copyright © ©
2013