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      Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers

      Author(s): 1 , 1 , 1
      Publication date Created:
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      Journal: Review of Scientific Instruments
      Publisher: AIP Publishing

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          Sub-10 nm imprint lithography and applications

          Stephen Y Chou (1997)
          Article 0 comments Cited 168 times – based on 0 reviews     Review now
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            Ordered magnetic nanostructures: fabrication and properties

            J Nogués, Ivan Schuller, J.L Vicent … (2003)
            Article 0 comments Cited 151 times – based on 0 reviews     Review now
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              Demonstration of a discharge pumped table-top soft-x-ray laser.

              Hartshorn, Rocca, Shlyaptsev … (1994)
              Article 0 comments Cited 82 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Review of Scientific Instruments
                Abbreviated Title: Review of Scientific Instruments
                Publisher: AIP Publishing
                ISSN (Print): 0034-6748
                ISSN (Electronic): 1089-7623
                Publication date Created: December 2015
                Publication date (Print): December 2015
                Volume: 86
                Issue: 12
                Page: 121301
                Affiliations
                [1 ]Electrical and Computer Engineering Department and NSF Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University, Fort Collins, Colorado 80523, USA
                Article
                DOI: 10.1063/1.4937899
                SO-VID: 4c83e442-146f-4df8-bc72-89bbce3f7ef4
                Copyright © © 2015
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                https://publishing.aip.org/authors/rights-and-permissions

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