Nonstable behavior of widely used ionization gauges

Borichevsky, S. C.; Arnold, P. C.

doi:10.1116/1.578835

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Nonstable behavior of widely used ionization gauges

Author(s): P. C. Arnold , S. C. Borichevsky

Publication date Created: March 1994

Publication date (Print): March 1994

Journal: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Publisher: American Vacuum Society

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Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Abbreviated Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Publisher: American Vacuum Society

ISSN (Print): 0734-2101

ISSN (Electronic): 1520-8559

Publication date Created: March 1994

Publication date (Print): March 1994

Volume: 12

Issue: 2

Pages: 568-573

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DOI: 10.1116/1.578835

SO-VID: 4e5466a9-791c-48c4-83d0-41765a9a1d1c

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Nonstable behavior of widely used ionization gauges

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