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7262. Reverse-bias current reduction in low-temperature-annealed silicon pn junctions by ultraclean ion-implantation technology
Publication date
Created:
January 1991
Publication date
(Print):
January 1991
Journal:
Vacuum
Publisher:
Elsevier BV
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Model Reduction of Parametrized Systems 2015
Author and article information
Journal
Title:
Vacuum
Abbreviated Title:
Vacuum
Publisher:
Elsevier BV
ISSN (Print):
0042207X
Publication date Created:
January 1991
Publication date (Print):
January 1991
Volume
: 42
Issue
: 8-9
Pages
: 577-578
Article
DOI:
10.1016/0042-207X(91)91069-Z
SO-VID:
500ede30-f1cd-413e-9eef-efedf0c0aad3
Copyright ©
© 1991
License:
https://www.elsevier.com/tdm/userlicense/1.0/
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