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      A model for the formation of amorphous Si by ion bombardment

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      Radiation Effects
      Informa UK Limited

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          Ion implantation of silicon and germanium at room temperature. Analysis by means of 1.0-MeV helium ion scattering

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            Ion implantation in semiconductors—Part I: Range distribution theory and experiments

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              ESR AND OPTICAL ABSORPTION STUDIES OF ION‐IMPLANTED SILICON

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                Author and article information

                Journal
                Radiation Effects
                Radiation Effects
                Informa UK Limited
                0033-7579
                September 13 2006
                September 13 2006
                : 6
                : 1
                : 27-32
                Article
                10.1080/00337577008235042
                51e8a930-41b1-4671-8cd9-b6901fecf9ec
                © 2006
                History

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