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Laser annealing studies on ion implanted iron in silicon
Author(s):
S Damgaard
,
M Oron
,
J. Petersen
,
Yu. Petrikin
,
G Weyer
Publication date:
1980
Journal:
Phys. Stat. Sol. (a)
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Italian Studies
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DOI::
10.1002/pssa.2210590108
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