Numerical simulation of the characteristics of the different metallic species falling on the growing film in d.c. magnetron sputtering

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Journal

Title: Thin Solid Films

Abbreviated Title: Thin Solid Films

Publisher: Elsevier BV

ISSN (Print): 00406090

Publication date Created: September 1996

Publication date (Print): September 1996

Volume: 286

Issue: 1-2

Pages: 305-316

Article

DOI: 10.1016/S0040-6090(95)08523-8

SO-VID: 573c2092-64b5-4c34-b26b-ec97b535b5a6

License:

http://www.elsevier.com/tdm/userlicense/1.0/

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