Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
0734211X
Publication date Created: 2004
Publication date
(Print):
2004
Volume: 22
Issue: 3
Page: 1331
Article
DOI: 10.1116/1.1722159
SO-VID: 5796bfaa-752a-4c5f-b153-aca2bc2c9184
Copyright statement: ©
2004