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      Micromachined inertial sensors

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          Journal
          Title: Proceedings of the IEEE
          Abbreviated Title: Proc. IEEE
          Publisher: Institute of Electrical and Electronics Engineers (IEEE)
          ISSN (Print): 00189219
          Publication date (Print): Aug. 1998
          Volume: 86
          Issue: 8
          Pages: 1640-1659
          Article
          DOI: 10.1109/5.704269
          SO-VID: 59a0a5a4-0685-4ce6-a9e7-5a7d24baaf7d
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