Frequency effects in silane plasmas for plasma enhanced chemical vapor deposition

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Journal

Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Abbreviated Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Publisher: American Vacuum Society

ISSN (Print): 0734-2101

ISSN (Electronic): 1520-8559

Publication date Created: July 1992

Publication date (Print): July 1992

Volume: 10

Issue: 4

Pages: 1080-1085

Article

DOI: 10.1116/1.578205

SO-VID: 5b22605f-c918-40e5-b953-4b07bfaef2e3

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