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Conductive SU8 Photoresist for Microfabrication
Author(s):
S. Jiguet
,
A. Bertsch
,
H. Hofmann
,
P. Renaud
Publication date
Created:
September 2005
Publication date
(Print):
September 2005
Journal:
Advanced Functional Materials
Publisher:
Wiley
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Author and article information
Journal
Title:
Advanced Functional Materials
Abbreviated Title:
Adv. Funct. Mater.
Publisher:
Wiley
ISSN (Print):
1616-301X
ISSN (Electronic):
1616-3028
Publication date Created:
September 2005
Publication date (Print):
September 2005
Volume
: 15
Issue
: 9
Pages
: 1511-1516
Article
DOI:
10.1002/adfm.200400575
SO-VID:
5b804c8d-299e-45b5-89de-f4fd56fea2fa
Copyright ©
© 2005
License:
http://doi.wiley.com/10.1002/tdm_license_1.1
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