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Infrared and Optical Emission Spectroscopy Study of Atmospheric Pressure Plasma-Enhanced Spatial ALD of Al2O3
Author(s):
Maria A. Mione
,
R. Engeln
,
V Vandalon
,
W. Kessels
,
F Roozeboom
Publication date:
2019
Journal:
Appl. Phys. Lett.
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oa repository (via OAI-PMH doi match)
oa repository (via OAI-PMH doi match)
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DOI::
10.1063/1.5113753
ScienceOpen disciplines:
Thin films & surfaces
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ScienceOpen disciplines:
Thin films & surfaces
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