Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
October
01 2010
Publication date
(Print):
October
01 2010
Volume: 19
Issue: 5
Page: 055012
Article
DOI: 10.1088/0963-0252/19/5/055012
SO-VID: 5eda3ac1-658a-4d82-bf62-9ffd7e1b83ce
Copyright © ©
2010