Title:
Journal of Micromechanics and Microengineering
Abbreviated Title:
J. Micromech. Microeng.
Publisher:
IOP Publishing
ISSN
(Print):
0960-1317
ISSN
(Electronic):
1361-6439
Publication date Created:
January
01 2014
Publication date
(Print):
January
01 2014
Publication date
(Electronic):
December
12 2013
Volume: 24
Issue: 1
Page: 013001
Article
DOI: 10.1088/0960-1317/24/1/013001
SO-VID: 5f08fd6b-7dd4-4d91-87e9-0a3459b4419b
Copyright © ©
2013