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Controlling the Composition of Doped Materials by ALD: A Case Study for Al-Doped TiO[sub 2] Films
Author(s):
Seong Keun Kim
,
Gyu-Jin Choi
,
Cheol Hwang
,
S.K. Kim
,
G-J Choi
,
C.S. HWANG
Publication date:
2008
Journal:
Electrochemical and Solid-State Letters
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Estudio del peso al nacer
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DOI::
10.1149/1.2909768
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