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      Aspects of scanning force microscope probes and their effects on dimensional measurement

      J. Phys. D Appl. Phys.

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          Journal
          10.1088/0022-3727/41/10/103001.

          Biochemistry, Chemistry

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          wrote:

          A very nice review by the leading SPM metrology scientists (UK NPL) on the various geometrical and physical effects of SPM probe on imaging and metrology.

          2017-12-02 12:05 UTC
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