Title:
IEEE Transactions on Semiconductor Manufacturing
Abbreviated Title:
IEEE Trans. Semicond. Manufact.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
ISSN
(Print):
0894-6507
ISSN
(Electronic):
1558-2345
Publication date Created:
May
2010
Publication date
(Print):
May
2010
Volume: 23
Issue: 2
Pages: 340-343
Article
DOI: 10.1109/TSM.2010.2045589
SO-VID: 6b12593c-6a5e-4a25-94f1-7b33a8a86e3e
Copyright © ©
2010