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Dynamic modelling of high dose oxygen profiles in SIMOX substrates
Author(s):
U. Bussmann
,
P.L.F. Hemment
,
R.P. Webb
,
A.K. Robinson
Publication date
Created:
January 1992
Publication date
(Print):
January 1992
Journal:
Materials Science and Engineering: B
Publisher:
Elsevier BV
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The Dynamic Brain
Author and article information
Journal
Title:
Materials Science and Engineering: B
Abbreviated Title:
Materials Science and Engineering: B
Publisher:
Elsevier BV
ISSN (Print):
09215107
Publication date Created:
January 1992
Publication date (Print):
January 1992
Volume
: 12
Issue
: 1-2
Pages
: 73-76
Article
DOI:
10.1016/0921-5107(92)90262-8
SO-VID:
6b515a68-0479-4d19-bf01-fa101dd85cdd
Copyright ©
© 1992
License:
https://www.elsevier.com/tdm/userlicense/1.0/
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