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      Dynamic modelling of high dose oxygen profiles in SIMOX substrates

      , , ,
      Materials Science and Engineering: B
      Elsevier BV

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          Journal
          Materials Science and Engineering: B
          Materials Science and Engineering: B
          Elsevier BV
          09215107
          January 1992
          January 1992
          : 12
          : 1-2
          : 73-76
          Article
          10.1016/0921-5107(92)90262-8
          6b515a68-0479-4d19-bf01-fa101dd85cdd
          © 1992

          https://www.elsevier.com/tdm/userlicense/1.0/

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