Blog
About

  • Record: found
  • Abstract: found
  • Article: not found

High-resolution elastic strain measurement from electron backscatter diffraction patterns: new levels of sensitivity.

  1 , ,

Ultramicroscopy

Read this article at

ScienceOpenPublisherPubMed
Bookmark
      There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

      Abstract

      In this paper, we demonstrate that the shift between similar features in two electron backscatter diffraction (EBSD) patterns can be measured using cross-correlation based methods to +/- 0.05 pixels. For a scintillator screen positioned to capture the usual large solid angle employed in EBSD orientation mapping this shift corresponds to only approximately 8.5 x 10(-5)rad at the pattern centre. For wide-angled EBSD patterns, the variation in the entire strain and rotation tensor can be determined from single patterns. Repeated measurements of small rotations applied to a single-crystal sample, determined using the shifts at four widely separated parts of the EBSD patterns, showed a standard deviation of 1.3 x 10(-4) averaged over components of the displacement gradient tensor. Variations in strains and rotations were measured across the interface in a cross-sectioned Si1-x Gex epilayer on a Si substrate. Expansion of the epilayer close to the section surface is accommodated by tensile strains and lattice curvature that extend a considerable distance into the substrate. Smaller and more localised shear strains are observed close to the substrate-layer interface. EBSD provides an impressive and unique combination of high strain sensitivity, high spatial resolution and ease of use.

      Related collections

      Author and article information

      Affiliations
      [1 ] Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK. angus.wilkinson@materials.ox.ac.uk
      Journal
      Ultramicroscopy
      Ultramicroscopy
      0304-3991
      0304-3991
      Mar 2006
      : 106
      : 4-5
      16324788 S0304-3991(05)00225-1 10.1016/j.ultramic.2005.10.001

      Comments

      Comment on this article