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      Damage produced by ion mplantation in silicon

      Author(s): ,
      Publication date Created:
      Publication date (Electronic):
      Journal: Radiation Effects
      Publisher: Informa UK Limited

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          ION IMPLANTATION OF SILICON: I. ATOM LOCATION AND LATTICE DISORDER BY MEANS OF 1.0-MeV HELIUM ION SCATTERING

          L Eriksson, J. Denhartog, J. Davies … (1967)
          Article 0 comments Cited 108 times – based on 0 reviews     Review now
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            Observation of ion bombardment damage in silicon

            D. J. Mazey, R. S. Barnes, R Nelson (1968)
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              Kikuchi-like reflection patterns obtained with the scanning electron microscope

              D. G. Coates (1967)
              Article 0 comments Cited 60 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Radiation Effects
                Abbreviated Title: Radiation Effects
                Publisher: Informa UK Limited
                ISSN (Print): 0033-7579
                Publication date Created: September 13 2006
                Publication date (Electronic): September 13 2006
                Publication date (Print): January 1970
                Volume: 6
                Issue: 1
                Pages: 33-43
                Article
                DOI: 10.1080/00337577008235043
                SO-VID: 6f12841e-f898-4d16-b3a7-fbd0dd11fbc6
                Copyright © © 1970
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