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      Transparent and conducting boron doped ZnO thin films grown by aerosol assisted chemical vapor deposition†

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      RSC Advances
      The Royal Society of Chemistry

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          Abstract

          ZnO based transparent conducting oxides are important as they provide an alternative to the more expensive Sn : In 2O 3 that currently dominates the industry. Here, we investigate B-doped ZnO thin films grown via aerosol assisted chemical vapour deposition. B : ZnO films were produced from zinc acetate and triethylborane using either tetrahydrofuran or methanol (MeOH) as the solvent. The lowest resistivity of 5.1 × 10 −3 Ω cm along with a visible light transmittance of ∼75–80% was achieved when using MeOH as the solvent. XRD analysis only detected the wurtzite phase of ZnO suggesting successful solid solution formation with B 3+ substituting Zn 2+ sites in the lattice. Refinement of the XRD patterns showed minimal distortion to the ZnO unit cell upon doping when MeOH was the solvent due to the immiscibility of the [BEt 3] solution (1.0 M solution in hexane) in methanol that limited the amount of B going into the films, thus preventing excessive doping.

          Abstract

          Boron doped zinc oxide thin films via aerosol assisted chemical vapor deposition with resisitivities as low as 5.1 × 10 −3 Ω cm.

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            Author and article information

            Journal
            RSC Adv
            RSC Adv
            RA
            RSCACL
            RSC Advances
            The Royal Society of Chemistry
            2046-2069
            17 November 2022
            15 November 2022
            17 November 2022
            : 12
            : 51
            : 33049-33055
            Affiliations
            [a] Materials Chemistry Centre, Department of Chemistry, University College London 20 Gordon Street London WC1H 0AJ UK
            [b] School of Engineering, London South Bank University London, SE1 0AA UK c.j.carmalt@ 123456ucl.ac.uk +44 20-7679-7463
            Author information
            https://orcid.org/0000-0002-5206-9558
            https://orcid.org/0000-0003-1788-6971
            Article
            d2ra05895b
            10.1039/d2ra05895b
            9671099
            36425205
            71e543b9-de0e-42f7-a891-b4b93fcdd315
            This journal is © The Royal Society of Chemistry
            History
            : 18 September 2022
            : 11 November 2022
            Page count
            Pages: 7
            Funding
            Funded by: Engineering and Physical Sciences Research Council, doi 10.13039/501100000266;
            Award ID: EP/L017709/1
            Categories
            Chemistry
            Custom metadata
            Paginated Article

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