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      Reticle Design for Minimizing Multiproject Wafer Production Cost

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          Journal
          Title: IEEE Transactions on Automation Science and Engineering
          Abbreviated Title: IEEE Trans. Automat. Sci. Eng.
          Publisher: Institute of Electrical and Electronics Engineers (IEEE)
          ISSN (Print): 1545-5955
          Publication date Created: October 2007
          Publication date (Print): October 2007
          Volume: 4
          Issue: 4
          Pages: 589-595
          Article
          DOI: 10.1109/TASE.2007.904239
          SO-VID: 72e802f6-8b2f-49dc-b037-2303ecdeb536
          Copyright © © 2007
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