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      Nanoscale luminescence spectroscopy of defects at buried interfaces and ultrathin films

      Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
      American Vacuum Society

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          The structure and properties of metal-semiconductor interfaces

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            Determination of Kilovolt Electron Energy Dissipation vs Penetration Distance in Solid Materials

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              Penetration and energy-loss theory of electrons in solid targets

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                Author and article information

                Journal
                JVTBD9
                Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
                J. Vac. Sci. Technol. B
                American Vacuum Society
                0734211X
                2001
                2001
                : 19
                : 5
                : 1762
                Article
                10.1116/1.1394728
                72f0ee42-26d5-43f0-85c4-36f8568ef7af
                © 2001
                History

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