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      Implementation of a CMOS/MEMS Accelerometer with ASIC Processes

      research-article
      Author(s): * ,
      Publication date (Electronic):
      Journal: Micromachines
      Publisher: MDPI
      Keywords: accelerometer design, spring design, analytical model

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          Abstract

          This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using the 0.18 μm application-specific integrated circuit (ASIC)-compatible CMOS/MEMS process. An approximate analytical model for the spring design is presented. The experiments showed that the resonant frequency of the proposed tri-axis accelerometer was around 5.35 kHz for out-plane vibration. The tri-axis accelerometer had an area of 1096 μm × 1256 μm.

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          Surface micromachined accelerometers

          B.E. Boser, R.T. Howe (1996)
          Article 0 comments Cited 45 times – based on 0 reviews     Review now
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            CMOS MEMS Fabrication Technologies and Devices

            Hongwei Qu (2016)
            This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator) CMOS MEMS are introduced separately. Introduction of associated devices follows the description of the respective CMOS MEMS technologies. Due to the vast array of CMOS MEMS devices, this review focuses only on the most typical MEMS sensors and actuators including pressure sensors, inertial sensors, frequency reference devices and actuators utilizing different physics effects and the fabrication processes introduced. Moreover, the incorporation of MEMS and CMOS is limited to monolithic integration, meaning wafer-bonding-based stacking and other integration approaches, despite their advantages, are excluded from the discussion. Both competitive industrial products and state-of-the-art research results on CMOS MEMS are covered.
            Article 0 comments Cited 22 times – based on 0 reviews     Review now
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              A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier

              Hongwei Qu, Huikai Xie, Deyou Fang (2008)
              Article 0 comments Cited 15 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Journal ID (nlm-ta): Micromachines (Basel)
                Journal ID (iso-abbrev): Micromachines (Basel)
                Journal ID (publisher-id): micromachines
                Title: Micromachines
                Publisher: MDPI
                ISSN (Electronic): 2072-666X
                Publication date (Electronic): 12 January 2019
                Publication date Collection: January 2019
                Volume: 10
                Issue: 1
                Electronic Location Identifier: 50
                Affiliations
                Institute of Electronic Engineering, National Chiao Tung University, Hsinchu 300, Taiwan; stellawen@ 123456mail.nctu.edu.tw
                Author notes
                [* ]Correspondence: thomas.ee02g@ 123456nctu.edu.tw ; Tel.: +886-3-573-1627
                Author information
                https://orcid.org/0000-0003-1456-2840
                Article
                Publisher ID: micromachines-10-00050
                DOI: 10.3390/mi10010050
                PMC ID: 6357200
                PubMed ID: 30642025
                SO-VID: 7327e656-e726-4ac9-b8f7-d9f9c14287d5
                Copyright © © 2019 by the authors.
                License:

                Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license ( http://creativecommons.org/licenses/by/4.0/).

                History
                Date received : 17 December 2018
                Date accepted : 08 January 2019
                Categories
                Subject: Article

                Keywords: accelerometer design,spring design,analytical model
                Data availability:
                Keywords: accelerometer design, spring design, analytical model

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