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      Superconformal Electrodeposition of Copper in 500–90 nm Features

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          Journal
          JESOAN
          Journal of The Electrochemical Society
          J. Electrochem. Soc.
          The Electrochemical Society
          00134651
          2000
          2000
          : 147
          : 12
          : 4524
          Article
          10.1149/1.1394096
          7540c4ba-be13-4ee4-a123-984417d580ce
          © 2000
          History

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