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      Design and Application of Quadrature Compensation Patterns in Bulk Silicon Micro-Gyroscopes

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          Abstract

          This paper focuses on the detailed design issues of a peculiar quadrature reduction method named system stiffness matrix diagonalization, whose key technology is the design and application of quadrature compensation patterns. For bulk silicon micro-gyroscopes, a complete design and application case was presented. The compensation principle was described first. In the mechanical design, four types of basic structure units were presented to obtain the basic compensation function. A novel layout design was proposed to eliminate the additional disturbing static forces and torques. Parameter optimization was carried out to maximize the available compensation capability in a limited layout area. Two types of voltage loading methods were presented. Their influences on the sense mode dynamics were analyzed. The proposed design was applied on a dual-mass silicon micro-gyroscope developed in our laboratory. The theoretical compensation capability of a quadrature equivalent angular rate no more than 412 °/s was designed. In experiments, an actual quadrature equivalent angular rate of 357 °/s was compensated successfully. The actual compensation voltages were a little larger than the theoretical ones. The correctness of the design and the theoretical analyses was verified. They can be commonly used in planar linear vibratory silicon micro-gyroscopes for quadrature compensation purpose.

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          A mode-matched silicon-yaw tuning-fork gyroscope with subdegree-per-hour Allan deviation bias instability

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            • Abstract: not found
            • Article: not found

            Surface micromachined z-axis vibratory rate gyroscope

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              • Record: found
              • Abstract: not found
              • Article: not found

              Quadrature-error compensation and corresponding effects on the performance of fully decoupled MEMS gyroscopes

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                Author and article information

                Journal
                Sensors (Basel)
                Sensors (Basel)
                Sensors (Basel, Switzerland)
                MDPI
                1424-8220
                November 2014
                29 October 2014
                : 14
                : 11
                : 20419-20438
                Affiliations
                [1 ] School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China; E-Mails: niyunfang@ 123456126.com (Y.N.); huanglibin@ 123456seu.edu.cn (L.H.)
                [2 ] Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education, Southeast University, Nanjing 210096, China
                Author notes

                External Editor: Stefano Mariani

                [* ] Author to whom correspondence should be addressed; E-Mail: hsli@ 123456seu.edu.cn ; Tel.: +86-25-8379-5920; Fax: +86-25-8379-2882.
                Article
                sensors-14-20419
                10.3390/s141120419
                4279491
                25356646
                7a66c24b-47a7-4d0d-9e59-0a6433a9f5c8
                © 2014 by the authors; licensee MDPI, Basel, Switzerland.

                This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license ( http://creativecommons.org/licenses/by/4.0/).

                History
                : 17 September 2014
                : 21 October 2014
                : 22 October 2014
                Categories
                Article

                Biomedical engineering
                mems,silicon micro-gyroscope,quadrature compensation,mechanical design
                Biomedical engineering
                mems, silicon micro-gyroscope, quadrature compensation, mechanical design

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