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Improved depth resolution in Auger depth profiling of multilayered thin films by reactive ion sputtering
Author(s):
Russell J. Blattner
,
S Nadel
,
C. Evans
,
A. G. Braundmeier
,
Charles Magee
,
Robert Blattner
,
Richard Blattner
,
C. EVANS
Publication date:
1979
Journal:
Surface and Interface Analysis
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HR-EBSD (High Resolution - Electron Back Scatter Diffraction)
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DOI::
10.1002/sia.740010107
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