Low-Temperature Al2O3Atomic Layer Deposition

George, S M; Groner, M. D.; Fabreguette, F H; Elam, J W

doi:10.1021/cm0304546

Record: found
Abstract: not found
Article: not found

Low-Temperature Al2O3Atomic Layer Deposition

Author(s): M. D. Groner , F. H. Fabreguette , J. W. Elam , S. M. George

Publication date Created: February 2004

Publication date (Print): February 2004

Journal: Chemistry of Materials

Publisher: American Chemical Society (ACS)

Read this article at

ScienceOpenPublisher

Bookmark

There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

Related collections

Author and article information

Journal

Title: Chemistry of Materials

Abbreviated Title: Chem. Mater.

Publisher: American Chemical Society (ACS)

ISSN (Print): 0897-4756

ISSN (Electronic): 1520-5002

Publication date Created: February 2004

Publication date (Print): February 2004

Volume: 16

Issue: 4

Pages: 639-645

Article

DOI: 10.1021/cm0304546

SO-VID: 7c5122ec-04c6-4012-9e2e-9216f48c1e19

History

Data availability:

Comments

Comment on this article

scite_

Cited by 254

See all cited by

Low-Temperature Al2O3Atomic Layer Deposition

Read this article at

Related collections

Politics of the Low Countries

Author and article information

Journal

Article

History

Comments

Comment on this article

Similar content 3,207

Cited by 254