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      GexSi1−x/Si strained‐layer superlattice grown by molecular beam epitaxy

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          Journal
          Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
          Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
          American Vacuum Society
          0734-2101
          1520-8559
          April 1984
          April 1984
          : 2
          : 2
          : 436-440
          Article
          10.1116/1.572361
          © 1984
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