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      Creep, Hysteresis, and Vibration Compensation for Piezoactuators: Atomic Force Microscopy Application

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      Journal of Dynamic Systems, Measurement, and Control
      ASME International

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          Most cited references23

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          Scanning Probe Microscopy and Spectroscopy

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            [Mathematical models of hysteresis]

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              Tracking control of a piezoceramic actuator

                Author and article information

                Journal
                JDSMAA
                Journal of Dynamic Systems, Measurement, and Control
                J. Dyn. Sys., Meas., Control
                ASME International
                00220434
                2001
                2001
                : 123
                : 1
                : 35
                Article
                10.1115/1.1341197
                7d89fca1-925f-4f68-ae06-b6694a84679f
                © 2001
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