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      Electron diffraction based techniques in scanning electron microscopy of bulk materials

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      Micron
      Elsevier BV

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          Summary

          OPEN ACCESS AUTHORS ACCEPTED MANUSCRIPT - Oxford Research Archive 

          The three scanning electron microscope diffraction based techniques of electron channelling patterns (ECPs), electron channelling constrast imaging (ECCI), and electron backscatter diffraction (EBSD) are reviewed. The dynamical diffraction theory is used to describe the physics of electron channelling, and hence the constrast observed in ECPs (and EBSD) and ECCI images of dislocations. Models for calculating channelling contrast are described and their limitations discussed. The practicalities of the experimental methods, including detector-specimen configurations, spatial resolution and sensitivities are given. Examples are given of the use of ECCI for imaging and characterising lattice defects, both individually and in groups, in semiconductor heterostructures and fatigued metals. Applications of the EBSD technique to orientation determination, phase identification and strain measurement are given and compared with use of ECPs. It is concluded that these techniques make the SEM a powerful instrument for characterising the local crystallography of bulk materials at the mesoscopic scale.

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          Most cited references76

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          A Kinematical Theory of Diffraction Contrast of Electron Transmission Microscope Images of Dislocations and other Defects

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            New approach to the high quality epitaxial growth of lattice‐mismatched materials

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              Electron channeling patterns in the scanning electron microscope

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                Author and article information

                Journal
                Micron
                Micron
                Elsevier BV
                09684328
                August 1997
                August 1997
                : 28
                : 4
                : 279-308
                Article
                10.1016/S0968-4328(97)00032-2
                1904.05550
                7de1ce36-8f16-4fbc-9d10-6f0936d0a02e
                © 1997

                http://www.elsevier.com/tdm/userlicense/1.0/

                History

                Condensed matter,Materials characterization,Materials science
                SEM,EBSD,ECCI,ECP,Electron Microscopy
                Condensed matter, Materials characterization, Materials science
                SEM, EBSD, ECCI, ECP, Electron Microscopy

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