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Electron diffraction based techniques in scanning electron microscopy of bulk materials

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Micron

Elsevier BV

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      Summary

      OPEN ACCESS AUTHORS ACCEPTED MANUSCRIPT - Oxford Research Archive 

      The three scanning electron microscope diffraction based techniques of electron channelling patterns (ECPs), electron channelling constrast imaging (ECCI), and electron backscatter diffraction (EBSD) are reviewed. The dynamical diffraction theory is used to describe the physics of electron channelling, and hence the constrast observed in ECPs (and EBSD) and ECCI images of dislocations. Models for calculating channelling contrast are described and their limitations discussed. The practicalities of the experimental methods, including detector-specimen configurations, spatial resolution and sensitivities are given. Examples are given of the use of ECCI for imaging and characterising lattice defects, both individually and in groups, in semiconductor heterostructures and fatigued metals. Applications of the EBSD technique to orientation determination, phase identification and strain measurement are given and compared with use of ECPs. It is concluded that these techniques make the SEM a powerful instrument for characterising the local crystallography of bulk materials at the mesoscopic scale.

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      Most cited references 76

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      A Kinematical Theory of Diffraction Contrast of Electron Transmission Microscope Images of Dislocations and other Defects

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        New approach to the high quality epitaxial growth of lattice‐mismatched materials

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          Electron channeling patterns in the scanning electron microscope

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            Author and article information

            Journal
            Micron
            Micron
            Elsevier BV
            09684328
            August 1997
            August 1997
            : 28
            : 4
            : 279-308
            10.1016/S0968-4328(97)00032-2
            © 1997

            http://www.elsevier.com/tdm/userlicense/1.0/

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