ScienceOpen:
research and publishing network
For Publishers
Discovery
Metadata
Peer review
Hosting
Publishing
For Researchers
Join
Publish
Review
Collect
My ScienceOpen
Sign in
Register
Dashboard
Blog
About
Search
Advanced search
My ScienceOpen
Sign in
Register
Dashboard
Search
Search
Advanced search
For Publishers
Discovery
Metadata
Peer review
Hosting
Publishing
For Researchers
Join
Publish
Review
Collect
Blog
About
4
views
0
references
Top references
cited by
1
0 reviews
Review
0
comments
Comment
0
recommends
+1
Recommend
0
collections
Add to
0
shares
Share
Twitter
Sina Weibo
Facebook
Email
1,914
similar
All similar
Record
: found
Abstract
: not found
Article
: not found
Summary Abstract Ion beam deposition of hydrogenated amorphous silicon films
Author(s):
A Kasdan
,
D. K. Goshorn
,
W. A. Lanford
Publication date:
1982
Journal:
Journal of Vacuum Science and Technology
Read this article at
ScienceOpen
Publisher
Bookmark
There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.
Related collections
Silicon thin film solar cells
Author and article information
Journal
DOI::
10.1116/1.571287
Data availability:
Comments
Comment on this article
Sign in to comment
scite_
Similar content
1,914
ICD-11 extension codes support detailed clinical abstraction and comprehensive classification
Authors:
Saskia E. Drösler
,
Stefanie Weber
,
Christopher G Chute
Predictive and prognostic factors for treatment and survival in 305 patients with advanced gastrointestinal poorly differentiated neuroendocrine carcinoma: the NORDIC NEC study [abstract number 4015]
Authors:
W Sorbye
,
S Welin
,
S. Langer
PROMIS® Health Organization (PHO) 2020 Conference Toward Patient-Centered Care: PROMIS Implementations and Advances Abstracts
Authors:
See all similar
Cited by
1
Ion bombardment control of morphology during the growth of hydrogenated amorphous silicon thin films by reactive ion beam deposition
Authors:
D P Goshorn
,
A. Kasdan
See all cited by