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Properties including step coverage of TiN thin films prepared by atomic layer deposition
Author(s):
J Kim
Publication date
Created:
April 15 2003
Publication date
(Print):
April 15 2003
Journal:
Applied Surface Science
Publisher:
Elsevier BV
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There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.
Related collections
Atomic Force Microscopy
Author and article information
Journal
Title:
Applied Surface Science
Abbreviated Title:
Applied Surface Science
Publisher:
Elsevier BV
ISSN (Print):
01694332
Publication date Created:
April 15 2003
Publication date (Print):
April 15 2003
Volume
: 210
Issue
: 3-4
Pages
: 231-239
Article
DOI:
10.1016/S0169-4332(03)00158-2
SO-VID:
8297503d-e811-4ff5-9b44-da24526cb6d3
Copyright ©
© 2003
License:
http://www.elsevier.com/tdm/userlicense/1.0/
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