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Process technologies for high density high speed 16 megabit dynamic RAM
F Horiguchi, A Nitayama, K. Hieda, T. Hamamoto, K Tsuda, K Sunouchi, N Takenouchi, S. Aritome, H. Takato, M. KIMURA, K. Yamabe, M. Nakase, Y KAMATA, F. Masuoka, K. TSUDA, Y Kamata, M. Kimura
1987
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