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      Revised structure zone model for thin film physical structure

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      Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
      American Vacuum Society

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          Journal
          Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
          Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
          American Vacuum Society
          0734-2101
          1520-8559
          April 1984
          April 1984
          : 2
          : 2
          : 500-503
          Article
          10.1116/1.572604
          87ab016c-09e7-4442-b505-6b3148f7f345
          © 1984
          History

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