Title:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Abbreviated Title:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Publisher:
American Vacuum Society
ISSN
(Print):
0734-2101
ISSN
(Electronic):
1520-8559
Publication date Created:
April
1984
Publication date
(Print):
April
1984
Volume: 2
Issue: 2
Pages: 500-503
Article
DOI: 10.1116/1.572604
SO-VID: 87ab016c-09e7-4442-b505-6b3148f7f345
Copyright © ©
1984