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      Deposition on micromachined silicon substrates of gas sensitive layers obtained by a wet chemical route: a CO/CH4 high performance sensor

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      Thin Solid Films

      Elsevier BV

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          Journal
          Thin Solid Films
          Thin Solid Films
          Elsevier BV
          00406090
          July 2001
          July 2001
          : 391
          : 2
          : 265-269
          Article
          10.1016/S0040-6090(01)00993-2
          © 2001

          http://www.elsevier.com/tdm/userlicense/1.0/

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