Nanoenergetic Materials for MEMS: A Review

Rossi, Carole; Tailhades, Philippe; Vahlas, Constantin; Esteve, Daniel; Zhang, Kaili; Alphonse, Pierre

doi:10.1109/JMEMS.2007.893519

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Nanoenergetic Materials for MEMS: A Review

Author(s): Carole Rossi , Kaili Zhang , Daniel Esteve , Pierre Alphonse , Philippe Tailhades , Constantin Vahlas

Publication date (Print): August 2007

Journal: Journal of Microelectromechanical Systems

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

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Most cited references 59

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Highly ordered nanochannel-array architecture in anodic alumina

Masashi Nakao, Hidetaka Asoh, Masahiro Satoh … (1997)

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Metal-assisted chemical etching in HF/H[sub 2]O[sub 2] produces porous silicon

X-X Li, P. Bohn (2000)

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Use of Epoxides in the Sol−Gel Synthesis of Porous Iron(III) Oxide Monoliths from Fe(III) Salts

John F. Poco, Randall L Simpson, Lawrence W. Hrubesh … (2001)

0 comments Cited 60 times – based on 0 reviews      Review now

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Author and article information

Journal

Title: Journal of Microelectromechanical Systems

Abbreviated Title: J. Microelectromech. Syst.

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

ISSN (Print): 1057-7157

Publication date Created: August 2007

Publication date (Print): August 2007

Volume: 16

Issue: 4

Pages: 919-931

Article

DOI: 10.1109/JMEMS.2007.893519

SO-VID: 8de21883-0c87-432d-a795-3621c4012767

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Nanoenergetic Materials for MEMS: A Review

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Annual Reviews: Coronavirus Research

Most cited references 59

Highly ordered nanochannel-array architecture in anodic alumina

Metal-assisted chemical etching in HF/H[sub 2]O[sub 2] produces porous silicon

Use of Epoxides in the Sol−Gel Synthesis of Porous Iron(III) Oxide Monoliths from Fe(III) Salts

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