Influence of Scattering and Ionization on RF Impedance in Glow Discharge Sheaths

There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

Related collections

Author and article information

Journal

Title: IBM Journal of Research and Development

Abbreviated Title: IBM J. Res. & Dev.

Publisher: IBM

ISSN (Print): 0018-8646

ISSN (Electronic): 0018-8646

Publication date Created: January 1979

Publication date (Print): January 1979

Volume: 23

Issue: 1

Pages: 16-23

Article

DOI: 10.1147/rd.231.0016

SO-VID: 8ec913e8-d60d-4f22-bc85-b4185c4a7ca5

History

Data availability:

Comments

Comment on this article

Cited by 35

See all cited by