Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
February
01 2016
Publication date
(Print):
February
01 2016
Publication date
(Electronic):
December
10 2015
Volume: 25
Issue: 1
Page: 015005
Article
DOI: 10.1088/0963-0252/25/1/015005
SO-VID: 919d9e47-0c7f-4a11-a8d4-d2312d07260c
Copyright © ©
2015