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A study on the pumping performance of the disk-type drag pumps for spiral channel in rarefied gas flow

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Vacuum

Elsevier BV

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      Journal
      Vacuum
      Vacuum
      Elsevier BV
      0042207X
      October 2004
      October 2004
      : 76
      : 1
      : 63-71
      10.1016/j.vacuum.2004.05.011
      © 2004

      http://www.elsevier.com/tdm/userlicense/1.0/

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