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      Conformality in atomic layer deposition: Current status overview of analysis and modelling

      1 , 2 , 3 , 1
      Applied Physics Reviews
      AIP Publishing

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          Atomic layer deposition: an overview.

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            Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

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              Handbook of Stochastic Methods

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                Author and article information

                Journal
                Applied Physics Reviews
                Applied Physics Reviews
                AIP Publishing
                1931-9401
                June 2019
                June 2019
                : 6
                : 2
                : 021302
                Affiliations
                [1 ]Department of Solid State Sciences, Ghent University, Krijgslaan 281/S1, B-9000 Ghent, Belgium
                [2 ]Department of Chemical and Metallurgical Engineering, Aalto University School of Chemical Engineering, P.O. Box 16100, FI-00076 AALTO, Finland
                [3 ]VTT Technical Research Centre of Finland, P.O. Box 1000, FI-02044 VTT, Finland
                Article
                10.1063/1.5060967
                92022674-b445-4f01-b21c-9133a6fc6038
                © 2019
                History

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